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Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process TemperaturesCharacterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
- Alternative Title
- Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
- Authors
- Byoung-Ho Choi
- Issue Date
- 16-6월-2014
- Publisher
- American Vacuum Society
- Citation
- ALD 2014
- Conference Name
- ALD 2014
- Place
- JA
- Conference Date
- 2014-06-15
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- There are no files associated with this item.
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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