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ALD 공정을 이용한 폴리카보네이트 기판의 Zinc Oxide 박막 특성분석Characterization of ZnO Film Deposited on Polycarbonate by ALD Process
- Alternative Title
- Characterization of ZnO Film Deposited on Polycarbonate by ALD Process
- Authors
- Byoung-Ho Choi
- Issue Date
- 14-5월-2014
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 2014년도 춘계학술대회
- Conference Name
- 한국정밀공학회 2014년도 춘계학술대회
- Place
- KO
- Conference Date
- 2014-05-14
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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