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Atomic Layer Deposition (ALD) for Surface and Interface EngineeringAtomic Layer Deposition (ALD) for Surface and Interface Engineering

Alternative Title
Atomic Layer Deposition (ALD) for Surface and Interface Engineering
Authors
Shim, Joon Hyung
Issue Date
25-4월-2014
Publisher
대한기계학회
Citation
2014년도 대한기계학회 열공학부문 춘계학술대회
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/40929
Conference Name
2014년도 대한기계학회 열공학부문 춘계학술대회
Place
KO
Conference Date
2014-04-23
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College of Engineering > Department of Mechanical Engineering > 2. Conference Papers

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공과대학 (기계공학부)
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