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Charge Transport and Dopant Location Study of High Doping and Highly Crystallized Mixed Phase Nano-Crystal Silicon Thin Film by Neutral Beam Assisted CVD Process Near Room Temperature Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-29T14:29:02Z | - |
| dc.date.available | 2021-08-29T14:29:02Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2013-12-02 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/42294 | - |
| dc.publisher | MATERIALS RESEARCH SOCIETY | - |
| dc.title | Charge Transport and Dopant Location Study of High Doping and Highly Crystallized Mixed Phase Nano-Crystal Silicon Thin Film by Neutral Beam Assisted CVD Process Near Room Temperature Deposition | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | 2013 MRS FALL MEETING PROGRAM & EXHIBIT | - |
| dc.relation.isPartOf | 2013 MRS FALL MEETING PROGRAM & EXHIBIT | - |
| dc.relation.isPartOf | 2013 MRS FALL MEETING PROGRAM & EXHIBIT | - |
| dc.citation.title | 2013 MRS FALL MEETING PROGRAM & EXHIBIT | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2013-12-01 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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