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TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modelingTiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
- Alternative Title
- TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
- Authors
- PARK KANG-BAK
- Issue Date
- 28-8월-2013
- Publisher
- AJC-APSE
- Citation
- AEPSE 2013
- Conference Name
- AEPSE 2013
- Place
- KO
Korea(Jeju)
- Conference Date
- 2013-08-25
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