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Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVDNeural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- Alternative Title
- Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- Authors
- PARK KANG-BAK
- Issue Date
- 11-7월-2013
- Publisher
- nano technology research association
- Citation
- The 11th NANO KOREA 2013 Symposium
- Conference Name
- The 11th NANO KOREA 2013 Symposium
- Place
- KO
Seoul(COEX)
- Conference Date
- 2013-07-10
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