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Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film BatteryCharacteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery

Alternative Title
Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery
Authors
BYUN, Dong Jin
Issue Date
19-11월-2020
Publisher
한국재료학회
Citation
2020년도 한국재료학회 춘.추계학술대회
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/4427
Conference Name
2020년도 한국재료학회 춘.추계학술대회
Place
KO
Conference Date
2020-11-18
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College of Engineering > Department of Materials Science and Engineering > 2. Conference Papers

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BYUN, Dong Jin
공과대학 (신소재공학부)
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