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Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion rangeDevelopment of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
- Alternative Title
- Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
- Authors
- Jaehwa Jeong
- Issue Date
- 18-10월-2012
- Publisher
- Institute of Control, Robotics and Systems
- Citation
- 2012 12th International Conference on Control, Automation and Systems, pp.1061 - 1064
- Conference Name
- 2012 12th International Conference on Control, Automation and Systems
- Place
- KO
- Conference Date
- 2012-10-17
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