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Effects of Neutral Particle Beam on Nano-Crystalline Silicon Thin Film Deposited by Using Neutral Beam Assisted Chemical Vapor Deposition at Room Temperature
- Authors
- Hong MunPyo
- Issue Date
- 21-8월-2012
- Publisher
- (사)한국진공학회(KVS)
- Citation
- 제 43회 한국진공학회 하계정기학술대회
- Conference Name
- 제 43회 한국진공학회 하계정기학술대회
- Place
- KO
- Conference Date
- 2012-08-20
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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