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Design of nano-device using highly stable insulator filmDesign of nano-device using highly stable insulator film

Alternative Title
Design of nano-device using highly stable insulator film
Authors
PARK, JUNG HO
Issue Date
6-4월-2012
Publisher
마이크로나노시스템학회
Citation
Proceedings of the 14th Korean MEMS Conference
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/46054
Conference Name
Proceedings of the 14th Korean MEMS Conference
Place
KO
Conference Date
2012-04-05
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