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Influence of Argon Neutral Particle Beam of High Energy in the Neutral Particle Beam Sputtering System Assisted the Change of Structural Properties on the Amorphous Carbon Film
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-29T20:47:01Z | - |
| dc.date.available | 2021-08-29T20:47:01Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2012-02-17 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/46136 | - |
| dc.publisher | 한국반도체학술대회 | - |
| dc.title | Influence of Argon Neutral Particle Beam of High Energy in the Neutral Particle Beam Sputtering System Assisted the Change of Structural Properties on the Amorphous Carbon Film | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | 제19회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 제19회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 제19회 한국반도체학술대회 | - |
| dc.citation.title | 제19회 한국반도체학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 고려대학교 자연캠퍼스 | - |
| dc.citation.conferenceDate | 2012-02-15 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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