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Influence of Argon Neutral Particle Beam of High Energy in the Neutral Particle Beam Sputtering System Assisted the Change of Structural Properties on the Amorphous Carbon Film
- Authors
- Hong MunPyo
- Issue Date
- 17-2월-2012
- Publisher
- 한국반도체학술대회
- Citation
- 제19회 한국반도체학술대회
- Conference Name
- 제19회 한국반도체학술대회
- Place
- KO
고려대학교 자연캠퍼스
- Conference Date
- 2012-02-15
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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