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Development of Robust Batch-Fabrication Process For High Performance SThM Probe And Quantitative Performance Evaluation
- Authors
- KWON, Oh Myoung
- Keywords
- SThM(Scanning Thermal Microscope), Batch-fabrication, Uniformity, Robust process, Sensitivity, Spatial Resolution
- Issue Date
- 19-12월-2009
- Publisher
- American Society Of Mechanical Engineers
- Citation
- ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference
- Conference Name
- ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference
- Place
- CC
Renaissance Shanghai Zhongshan Park Hotel, Shanghai, China
- Conference Date
- 2009-12-18
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- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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