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유연힌지를 채용한 3 차원 정밀 스테이지 연구
- Authors
- Woo Chun Choi
- Issue Date
- 11-11월-2009
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 2009년도 추계학술대회, pp.545 - 546
- Conference Name
- 한국정밀공학회 2009년도 추계학술대회
- Place
- KO
- Conference Date
- 2009-11-10
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Collections - Graduate School > Graduate School of management of technology > 2. Conference Papers
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