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A Study of the CMP(Chemical Mechanical Process) Simulation using FEM(Finite Element Method) and the Run-to-Run Control Algorithm
- Authors
- Jun-Geol Baek
- Issue Date
- 9-11월-2009
- Publisher
- ISMI
- Citation
- AEC/APC Symposium Asia 2009
- Conference Name
- AEC/APC Symposium Asia 2009
- Place
- JA
National Center of Sciences Building, Tokyo, Japan
- Conference Date
- 2009-11-09
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