Characterization of physical and mechanical properties of Al2O3-doped ZnO (AZO) thin films deposited on transparent polyimide supports with various ALD process parameters
- Authors
- Lee, Gyeong-Beom; Song, Seung Hak; Lee, Myeong-Woo; Kim, Yun-Jae; Choi, Byoung-Ho
- Issue Date
- 1-1월-2021
- Publisher
- ELSEVIER
- Keywords
- Atomic layer deposition; Transparent polyimide; Flexible display; Nanoscratch; Transparent conductive oxides; Mechanical reliability
- Citation
- APPLIED SURFACE SCIENCE, v.535
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED SURFACE SCIENCE
- Volume
- 535
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/50172
- DOI
- 10.1016/j.apsusc.2020.147731
- ISSN
- 0169-4332
- Abstract
- Fabrication of Al2O3 doped ZnO (AZO) thin films on transparent polyimide substrates using ex-situ oxygen plasma-assisted atomic layer deposition (ALD) is studied. The alumina composition is controlled by adjusting the ALD cycle ratio in the reaction sequence from 9:1 to 49:1 (diethylzinc/H2O:trimethylaluminum/H2O). Nanoscratch and electromechanical tensile tests are performed to evaluate the mechanical reliability of the AZO thin films fabricated under various processing conditions. Conventionally deposited AZO shows the lowest sheet resistance of 294 Omega/sq at a doping ratio of 19:1 at 150 degrees C. However, the resistance of AZO grown on a polymer surface modified by plasma is higher at 429 Omega/sq. Nanoscratch results reveal that the first critical load could be increased by surface hardening and strong adherence as a function of the process temperature and plasma treatment. Under a tensile strain, doping of alumina delayed the strain (%) at crack initiation from 0.58 to 0.82%. The initial elastic modulus of the AZO/transparent polyimide composites showed a transient decrease with an increase in the alumina content from 2.7 to 3.8 at.%. These results demonstrating the mechanical characteristics of thin films as a function of the processing conditions are significant for flexible display manufacturing.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.