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Analysis on Structural, Electrical and Optical Properties of Pulsed Laser Deposited HfO_2 Films for Gate Dielectic Material of Transparent TFTs

Authors
Moon Byung-Moo
Issue Date
15-Apr-2009
Publisher
The 166th Committee on Photonic&Electronic Oxide, Japan Society for the promotion of Science(JSPS)
Citation
6th International Symposium on Transparent Oxide Thin films for Electronics and Optics (TOEO-6)
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/51111
Conference Name
6th International Symposium on Transparent Oxide Thin films for Electronics and Optics (TOEO-6)
Place
JA
Tokyo Fashion Town(TFT) Building Ariake,Tokyo,Japan
Conference Date
2009-04-15
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College of Engineering > School of Electrical Engineering > 2. Conference Papers

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