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Novel deposition technology for nano-crystalline silicon thin film at low temperature by reactive particle beam assisted CVD system
- Authors
- Hong MunPyo
- Keywords
- TFT, Low temperature, CVD
- Issue Date
- 5-3월-2009
- Publisher
- Ecole Polytechnique, Centre national de la recherche scientifique(CNRS) and the Society for Information Display (SID)
- Citation
- 2009 International Thin Film Transistors Conference, pp.47 - 50
- Conference Name
- 2009 International Thin Film Transistors Conference
- Place
- FR
Ecole Polytechnique, Paris, France
- Conference Date
- 2009-03-05
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- There are no files associated with this item.
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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