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Effect of Oxygen Ambient on Intrinsic Stress of ZnO Thin Films and Physical Properties for The Channel Layer of Transparent TFTs
- Authors
- Moon Byung-Moo
- Issue Date
- 20-Feb-2009
- Publisher
- 삼성전자(주)/한국반도체산업협회/한국반도체연구조합
- Citation
- 제16회 한국반도체학술대회
- Conference Name
- 제16회 한국반도체학술대회
- Place
- KO
대전컴벤션센터(DCC)
- Conference Date
- 2009-02-18
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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