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A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer
- Authors
- Bang, Joona
- Issue Date
- 25-6월-2008
- Publisher
- TMS Meeting Services
- Citation
- 2008 Electronic Materials Conference
- Conference Name
- 2008 Electronic Materials Conference
- Place
- US
University of California, Santa Barbara
- Conference Date
- 2008-06-25
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