A 300-GHz CMOS 7-by-7 Detector Array for Optics-less THz Imaging with Scan-less Target Object

Abstract

In this work, a 300-GHz 7 x 7 detector array based on a 65-nm Si CMOS technology has been developed and transmission imaging was performed using the detector array without any optical elements. The detector array consists of a 7-by-7 arrangement of 49 pixels in a full-chip size of 4 mm x 4 mm. The unit pixel is composed of a single direct detector with a differential common-gate configuration and a differential patch antenna. The fabricated CMOS detector array chip was mounted on a planar package for electrical characterization and imaging. The measured responsivity and the noise equivalent power (NEP) showed best values of 3599 V/W and 12.46 pW/Hz(1/2), respectively, at 303 GHz. Various THz imaging experiments were carried out based on the packaged CMOS detector array with a setup that does not require optical elements or the raster scan of the target object.