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High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology
- Authors
- Moon Byung-Moo
- Publisher
- 4th IEEE-NEMS
- Citation
- 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
- Conference Name
- 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
- Place
- CC
- Conference Date
- 2009-01-05
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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