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사파이어 기판에 sub-micron급 패터닝을 위한 나노 임프린트 리소그래피 공정
- Authors
- Lee, Heon
- Publisher
- 한국재료학회
- Citation
- 2009 춘계 재료 학회
- Conference Name
- 2009 춘계 재료 학회
- Place
- KO
- Conference Date
- 2009-05-21
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