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FABRICATION OF SUB-MICRON SIZED SAPPHIRE PATTERNS BY USING NANOIMPRINT LITHOGRAPHY AND INDUCTIVELY-COUPLED PLASMA ETCHING
- Authors
- Lee, Heon
- Publisher
- LED 반도체 조명 학회
- Citation
- ICNS-8
- Conference Name
- ICNS-8
- Place
- KO
- Conference Date
- 2009-10-18
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