Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Sidewall chemistry of nano-contact patterns in C4F8 + CH2F2 + O-2 + Ar inductively coupled plasmas

Authors
Lee, JaeminKim, ChangmokLee, Hyun WooKwon, Kwang-Ho
Issue Date
1-1월-2019
Publisher
ELSEVIER SCIENCE SA
Keywords
Octafluorocyclobutane; Difluoromethane; X-ray photoelectron spectroscopy; Sidewall; Polymer; Residue; Silicon dioxide
Citation
THIN SOLID FILMS, v.669, pp.227 - 234
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
669
Start Page
227
End Page
234
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/68355
DOI
10.1016/j.tsf.2018.11.009
ISSN
0040-6090
Abstract
In this study, silicon dioxide contact holes were etched with C4F8 + CH2F2 + O-2 + Ar gas plasmas, and the characteristics of the etching residue thereby generated inside the nanopatterns were investigated. The chemical composition of the etching residue formed on the sidewalls of the nano-contact patterns in the gas chemistry was investigated at various oxygen partial pressures by performing in situ Ar sputtering and X-ray photoelectron microscopy at different take-off angles. To investigate the effect of the plasma-active species (polymerizing radicals and charged species) on the formation of the etching residue, plasma diagnostics were conducted via optical emission spectroscopy and Langmuir probe measurements. It was found that as the oxygen content of the plasma increased, the thickness of the fluorocarbon (FC) polymer layer formed on the sidewalls of the nanopatterns decreased with a reduction in the FC polymer deposition rate of the plasma. In addition, at higher aspect ratios, the FC polymer layer showed a lower fluorine content.
Files in This Item
There are no files associated with this item.
Appears in
Collections
Graduate School > Department of Control and Instrumentation Engineering > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Kwon, Kwang Ho photo

Kwon, Kwang Ho
제어계측공학과
Read more

Altmetrics

Total Views & Downloads

BROWSE