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Ag:SiOxNy-Based Bilayer ReRAM Structure with Self-Limiting Bidirectional Threshold Switching Characteristics for Cross-Point Array Application

Authors
Lee, Tae HoKang, Dae YunKim, Tae Geun
Issue Date
10-10월-2018
Publisher
AMER CHEMICAL SOC
Keywords
threshold switching; resistive switching; programmable metallization cell; sneak current; conductive channel; crossbar array
Citation
ACS APPLIED MATERIALS & INTERFACES, v.10, no.40, pp.33768 - 33772
Indexed
SCIE
SCOPUS
Journal Title
ACS APPLIED MATERIALS & INTERFACES
Volume
10
Number
40
Start Page
33768
End Page
33772
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/72501
DOI
10.1021/acsami.8b12385
ISSN
1944-8244
Abstract
We fabricate a Pt/Ag:SiOxNy/Ti programmable metallization cell exhibiting bidirectional threshold switching (TS) or nonvolatile resistive switching (RS) characteristics through a simple thermal annealing process. The cell composed of pristine Ag:SiOxNy layers showed self-limiting TS characteristics with high selectivity and extremely low OFF currents, whereas the same cell showed typical RS characteristics after thermal annealing at 250 degrees C. The operating mechanism was investigated using scanning transmission electron microscopy and X-ray photoelectron spectroscopy. Next, a Ag:SiOxNy-based one selector-one resistor device was fabricated by employing both TS and RS characteristics in a single cell, which exhibited excellent self-rectifying memory performance.
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