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A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors
- Authors
- Min Nam Ki
- Publisher
- IEEE Sensors in ITaly, 2008
- Citation
- THE SEVENTH IEEE CONFERENCE ON SENSORS
- Conference Name
- THE SEVENTH IEEE CONFERENCE ON SENSORS
- Place
- IT
- Conference Date
- 2008-10-26
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