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A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors

Authors
Kwon, Kwang-Ho
Publisher
IEEE Sensors in ITaly, 2008
Citation
THE SEVENTH IEEE CONFERENCE ON SENSORS
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/75754
Conference Name
THE SEVENTH IEEE CONFERENCE ON SENSORS
Place
IT
Conference Date
2008-10-26
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Graduate School > Department of Control and Instrumentation Engineering > 2. Conference Papers

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