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A Frontside Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber for NDIR CO2 Gas Sensors

Authors
Kwon, Kwang-Ho
Publisher
APCOT 2008
Citation
Asia-Pacific Conference On Transducers and Micro-Nano Technology
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/76460
Conference Name
Asia-Pacific Conference On Transducers and Micro-Nano Technology
Place
CH
Conference Date
2008-05-22
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Graduate School > Department of Control and Instrumentation Engineering > 2. Conference Papers

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