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Fabrication and characterization of suspended silicon nanowire devices with intruded metal silicide contact

Authors
Hwang, Sung Woo
Publisher
ICPS
Citation
29th International Conference on the Physics of Semiconductors (ICPS2008), pp.458 - 459
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/78364
Conference Name
29th International Conference on the Physics of Semiconductors (ICPS2008)
Place
BL
Conference Date
2008-07-27
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College of Engineering > School of Electrical Engineering > 2. Conference Papers

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