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A flexure guided stage with piezo electric transducers for laser micro/nano machining
- Authors
- Jaehwa Jeong
- Publisher
- European Society for Precision Engineering and Nanotechnology
- Citation
- euspen 10th Anniversary International Conference & 10th Annual General Meeting
- Conference Name
- euspen 10th Anniversary International Conference & 10th Annual General Meeting
- Place
- SZ
- Conference Date
- 2008-05-18
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