Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies
- Authors
- Yunsoo Kim
- Citation
- 제34회 한국진공학회 동계학술대회
- Conference Name
- 제34회 한국진공학회 동계학술대회
- Place
- 용인 단국대학교 죽전캠퍼스
- Conference Date
- 2008-02-14
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.