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Dissolution Behaviors and Applications of Silicon Oxides and Nitrides in Transient Electronics
- Authors
- SukWon Hwang
- Issue Date
- Jul-2014
- Publisher
- WILEY-V C H VERLAG GMBH
- Citation
- ADVANCED FUNCTIONAL MATERIALS, v.24, no.28, pp.4427 - 4434
- Indexed
- SCIE
SCOPUS
- Journal Title
- ADVANCED FUNCTIONAL MATERIALS
- Volume
- 24
- Number
- 28
- Start Page
- 4427
- End Page
- 4434
- ISSN
- 1616301X
- Abstract
- Silicon oxides and nitrides are key materials for dielectrics and encapsulation layers in a class of silicon-based high performance electronics that has ability to completely dissolve in a controlled fashion with programmable rates, when submerged in bio-fluids and/or relevant solutions. This type of technology, referred to as
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