Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Formation of low resistance Ti/Al-based ohmic contacts on (11-22) semipolar n-type GaN

Authors
Park, Jae-SeongHan, JaecheonSeong, Tae-Yeon
Issue Date
15-12월-2015
Publisher
ELSEVIER SCIENCE SA
Keywords
Semipolar GaN; Ohmic contact; Light-emitting diode; Ti/Al
Citation
JOURNAL OF ALLOYS AND COMPOUNDS, v.652, pp.167 - 171
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF ALLOYS AND COMPOUNDS
Volume
652
Start Page
167
End Page
171
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/91571
DOI
10.1016/j.jallcom.2015.08.181
ISSN
0925-8388
Abstract
The electrical properties of Ti/Al-based ohmic contacts to (0001) c-plane and (11-22) semipolar n-type GaN were investigated as a function of annealing temperature. The electrical properties of both c-plane Ti/Al/Au and semi-polar Ti/(Ta)/Al/Au contacts became improved upon annealing at 600 degrees C for 1 min. The specific contact resistances of the 600 degrees C-annealed c-plane Ti/Al/Au, semi-polar Ti/Al/Au, and semipolar Ti/Ta/Al/Au contacts were 3.2 x 10(-4), 1.5 x 10(-4), and 4.8 x 10(-5) Omega cm(2), respectively. The X-ray photoemission spectroscopy (XPS) results showed that the Ga 2p core level for the c-plane samples experienced a smaller shift toward the conduction band than that for the semipolar samples. The XPS depth profile results exhibited that the semipolar samples contained more interfacial oxygen than the c-plane samples. Oxygen was present in the form of Al-oxide at the interface region, but as oxygen atoms in the GaN surface region. On the basis of the electrical and XPS results, the annealing-induced improvement of the electrical properties was described in terms of the formation of donor-like defects. (C) 2015 Elsevier B.V. All rights reserved.
Files in This Item
There are no files associated with this item.
Appears in
Collections
College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher SEONG, TAE YEON photo

SEONG, TAE YEON
공과대학 (신소재공학부)
Read more

Altmetrics

Total Views & Downloads

BROWSE