Effect of Oxygen Plasma Treatment on Carbon Nanotube-Based Sensors

Abstract

We present the research results of the use of plasma modification for the fabrication of carbon nanotube-based devices for chemical and biological sensing. The oxygen plasma treatment of multiwalled carbon nanotubes (MWCNTs) effectively grafts oxygen atoms onto the CNT surface. For investigating the impact of plasma modification on the MWCNT-based sensor performance, three different sensors are fabricated: NH3 gas sensors, humidity sensors, and immunosensors. The plasma-modified MWCNTs (p-MWCNTs) exhibit a sensitivity to NH3 that is approximately twice that of the corresponding untreated sensor. The humidity sensor with a p-MWCNT top electrode exhibits a much faster response time compared with the untreated MWCNT electrodes. The p-MWCNT immunosensor exhibits a detection limit almost 1000 times lower than that of the standard ELISA assay, while the untreated MWCNTs exhibit no detectable signal. These results imply that the oxygen-containing functional groups on the CNT surface significantly affect the performance of the CNT-based chemical and biological sensors.