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ITO/Ag/ITO multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes

Authors
Lee, Jae HoonWoo, Kie YoungKim, Kyeong HeonKim, Hee-DongKim, Tae Geun
Issue Date
1-12월-2013
Publisher
OPTICAL SOC AMER
Citation
OPTICS LETTERS, v.38, no.23, pp.5055 - 5058
Indexed
SCIE
SCOPUS
Journal Title
OPTICS LETTERS
Volume
38
Number
23
Start Page
5055
End Page
5058
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/101340
DOI
10.1364/OL.38.005055
ISSN
0146-9592
Abstract
ITO/Ag/ITO (IAI) multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes are fabricated by reactive sputtering, optimized by annealing, and characterized with respect to electrical and optical properties. Increasing the annealing temperature from 300 degrees C to 500 degrees C decreased the sheet resistance and increased the transmittance. This may result from an observed improvement in the crystallinity of the IAI multilayer and a reduction in the near-UV absorption coefficient of Ag. We observed the lowest sheet resistance (9.21 Omega/sq) and the highest optical transmittance (88%) at 380 nm for the IAI multilayer samples annealed in N-2 gas at 500 degrees C. (C) 2013 Optical Society of America
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