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Gate All Around Metal Oxide Field Transistor: Surface Potential Calculation Method including Doping and Interface Trap Charge and the Effect of Interface Trap Charge on Subthreshold Slope

Authors
Najam, FarazKim, SangsigYu, Yun Seop
Issue Date
Oct-2013
Publisher
IEEK PUBLICATION CENTER
Keywords
Compact model; drain-source current; gate-all-around metal-oxide-semiconductor-field-effect-transistor (GAAMOSFET); interface trap distribution; scaling theory
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.13, no.5, pp.530 - 537
Indexed
SCIE
SCOPUS
KCI
Journal Title
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Volume
13
Number
5
Start Page
530
End Page
537
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/101985
DOI
10.5573/JSTS.2013.13.5.530
ISSN
1598-1657
Abstract
An explicit surface potential calculation method of gate-all-around MOSFET (GAAMOSFET) devices which takes into account both interface trap charge and varying doping levels is presented. The results of the method are extensively verified by numerical simulation. Results from the model are used to find qualitative and quantitative effect of interface trap charge on subthreshold slope (SS) of GAAMOSFET devices. Further, design constraints of GAAMOSFET devices with emphasis on the effect of interface trap charge on device SS performance are investigated.
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