Fast-speed, high-sensitivity polyimide humidity sensors with superhydrophilic carbon nanotube network electrodes
- Authors
- Lee, Myung Jin; Hong, Hyun Pyo; Kwon, Kwang Ho; Park, Chan Won; Min, Nam Ki
- Issue Date
- 8월-2013
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- MWCNT film; Humidity sensor; Surface modification; Polyimide
- Citation
- SENSORS AND ACTUATORS B-CHEMICAL, v.185, pp.97 - 104
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSORS AND ACTUATORS B-CHEMICAL
- Volume
- 185
- Start Page
- 97
- End Page
- 104
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/102649
- DOI
- 10.1016/j.snb.2013.04.117
- ISSN
- 0925-4005
- Abstract
- We present a highly fast capacitive humidity sensor based on superhydrophilic carbon nanotube network electrodes prepared by using spray deposition of multiwalled carbon nanotubes (MWCNT). Spray-deposited MWCNT films form a well-entangled and interconnected porous network with nano-scale open pores. These properties are highly desirable for fast-speed capacitive humidity sensors. In addition, the effect of plasma functionalization (pf) of the MWCNT surface on sensor response was evaluated. The pf-MWCNT electrode sensor exhibited a much faster response time (about 1.5 s) and a higher sensitivity (0.647 pF/%RH) to humidity, compared to untreated MWCNT and porous Cr electrodes. The large improvement in performance was explained by the percolated pore network, which is more accessible to water molecules; the superhydrophilic surface of the MWCNTs favorable to more adsorption of water vapor; and capillary condensation, which can amplify the capacitance response to relative humidity. (C) 2013 Elsevier B.V. All rights reserved.
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Collections - Graduate School > Department of Control and Instrumentation Engineering > 1. Journal Articles
- College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 1. Journal Articles
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