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Electrical properties of Cr-doped SrTiO3 films as a switch material in ReCTF devices

Authors
Seo, YujeongSong, MinyeongAn, Ho-MyoungKim, Hee-DongKim, Tae GeunSung, Yun-MoKim, Yeon Soo
Issue Date
10월-2012
Publisher
ELSEVIER
Keywords
ReCTF; CTF; ReRAM; C-V; I-V; NVMs
Citation
MICROELECTRONIC ENGINEERING, v.98, pp.321 - 324
Indexed
SCIE
SCOPUS
Journal Title
MICROELECTRONIC ENGINEERING
Volume
98
Start Page
321
End Page
324
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/107333
DOI
10.1016/j.mee.2012.07.082
ISSN
0167-9317
Abstract
The electrical properties of Cr-SrTiO3 films deposited on p-Si(100) substrates are investigated for application to a new type of charge-trap flash memory, named ReCTF (ReRAM + CTF). The Cr-SrTiO3 film used as a switch in a ReCTF device has a complete cubic perovskite structure with a (200) crystallographic orientation. By means of current-voltage (I-V) and capacitance-voltage (C-V) analyses, we found that it exhibited electric-field-induced threshold switching characteristics and there were no trapping effects. In this study, we investigated how the retention characteristics of the ReCTF device can be improved without any special processes by applying an optimized Cr-SrTiO3 film. (C) 2012 Elsevier B.V. All rights reserved.
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College of Engineering > School of Electrical Engineering > 1. Journal Articles
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공과대학 (전기전자공학부)
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