Study on wet patterning of thin films in vertical-transfer wet station for thin-film-transistor manufacturing
- Authors
- Lee, Sang-Hyuk; Park, In-Sun; Choe, HeeHwan; Hong, Mun-Pyo; Seo, Jong Hyun; Kim, Pal-gon
- Issue Date
- 5월-2011
- Publisher
- SOC INFORMATION DISPLAY
- Keywords
- Vertical transfer; wet etching; TFT manufacturing
- Citation
- JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, v.19, no.5, pp.380 - 386
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY
- Volume
- 19
- Number
- 5
- Start Page
- 380
- End Page
- 386
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/112504
- DOI
- 10.1889/JSID19.5.380
- ISSN
- 1071-0922
- Abstract
- To overcome the "pseudo-puddling effect" in a low-angle-tilt transfer system with an oversized glass substrate over 2 m, a vertical transfer is suggested. The aim of the present work is to study the wet-etching behavior of an aluminum/molybdenum double layer deposited on the glass substrate in a vertical transfer wet etching system and compare it with a typical 5 degrees-tilt-transfer system. Compared with the tilt-transfer wet station, the vertical etching system has three advantages, namely, 50% space savings, higher throughput due to the high etch rate, and good etch uniformity over the entire glass for thin-film-transistor application. The computational fluid-dynamics analysis is used to predict the change of the etch uniformity as a function of the tilt angle of the glass substrate.
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Collections - Graduate School > Department of Applied Physics > 1. Journal Articles
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