Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Development of higher performance indium tin oxide films at a very low temperature (< 80 degrees C) by the neutral beam-assisted sputtering process

Authors
Jang, Jin NyoungLee, You JongLee, Jun YoungJang, Yun SungHong, MunPyoOh, Kyoung SukYoo, Suk JaeKim, DaechulLee, BonjuJang, Won-Gun
Issue Date
31-1월-2011
Publisher
ELSEVIER SCIENCE SA
Keywords
Neutral beam assisted deposition; Indium tin oxide; Low temperature deposition; Sputtering; Nano crystalline
Citation
THIN SOLID FILMS, v.519, no.7, pp.2098 - 2102
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
519
Number
7
Start Page
2098
End Page
2102
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/113238
DOI
10.1016/j.tsf.2010.10.041
ISSN
0040-6090
Abstract
At very low temperatures (<80 degrees C), improved performance indium tin oxide (ITO) thin films with a low resistivity of 4.22 x 10(-4) Omega cm and high transmittance >90% at 550 nm were developed using the neutral beam-assisted sputtering (NBAS) technique, which included a cyclic inter-treatment process with an Ar neutral beam. Transmission electron microscopy and electron diffraction showed that the neutral particles with hyper-thermal energy was able to enhance the formation of the nano-crystalline phase and activate the dopant without additional heating or plasma damage during ITO thin film deposition. (C) 2010 Elsevier B.V. All rights reserved.
Files in This Item
There are no files associated with this item.
Appears in
Collections
Graduate School > Department of Applied Physics > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Hong, Mun Pyo photo

Hong, Mun Pyo
응용물리학과
Read more

Altmetrics

Total Views & Downloads

BROWSE