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Effective heat conservation in a sandwich-structured microbolometer using mesoporous TiO2 layers
- Authors
- Choi, Sun Gyu; Ha, Tae-Jung; Park, Hyung-Ho; Shin, Sangwoo; Cho, Hyung Hee; Kwon, Kwang-Ho; Hong, MunPyo
- Issue Date
- Oct-2009
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Mesoporous oxide; TiO2; Microbolometer; Heat conservation
- Citation
- SENSORS AND ACTUATORS A-PHYSICAL, v.155, no.1, pp.131 - 135
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSORS AND ACTUATORS A-PHYSICAL
- Volume
- 155
- Number
- 1
- Start Page
- 131
- End Page
- 135
- ISSN
- 0924-4247
- Abstract
- The heat loss of the a-Si:H resistor layer in a microbolometer might be reduced by using ordered mesoporous TiO2 thin films as thermal insulation layers. Infrared absorption of mesoporous TiO2 thin films in the 833-1250 cm(-1) wave number region Was Measured using a Fourier transform infrared spectrometer. Also, the infrared absorption rates of upper and lower mesoporous TiO2 films inserted into the microbolometer were calculated to be above 84% in the 8-12 mu m wavelength region. The CFD-ACE thermal simulation program Was used to evaluate the thermal isolation effectiveness of mesoporous TiO2 films on the a-Si:H layer: the inclusion of this film on the a-Si:H layer improved heat conservation. A mesoporous TiO2 thin Him effectively reduced the thermal loss from a-Si:H resistor surface and drastically increased the temperature of the resistor film. (C) 2009 Elsevier B.V. All rights reserved.
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Related Researcher
- Hong, Mun Pyo
- Department of Applied Physics