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Analyzing measurement accuracy and causes of error in Vacuum Null Point Scanning Thermal Microscope by increasing the degree vacuum진공도가 올라감에 따라 진공 평형점 주사탐침열현미경의 계측정확도와 오차의 원인분석

Alternative Title
진공도가 올라감에 따라 진공 평형점 주사탐침열현미경의 계측정확도와 오차의 원인분석
Authors
KWON, Oh Myoung
Issue Date
23-5월-2019
Publisher
대한기계학회
Citation
열공학부문 2019년도 춘계학술대회
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/12694
Conference Name
열공학부문 2019년도 춘계학술대회
Place
KO
부산BEXCO
Conference Date
2019-05-22
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College of Engineering > Department of Mechanical Engineering > 2. Conference Papers

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KWON, Oh Myoung
공과대학 (기계공학부)
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