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Process effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputteringProcess effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputtering
- Alternative Title
- Process effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputtering
- Authors
- Hong MunPyo
- Issue Date
- 24-8월-2016
- Publisher
- The Korean Vacuum Society (KVS)
- Citation
- IVC-20(20th International Vacuum Congress)
- Conference Name
- IVC-20(20th International Vacuum Congress)
- Place
- KO
- Conference Date
- 2016-08-21
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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