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Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThMQuantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
- Alternative Title
- Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
- Authors
- KWON, Oh Myoung
- Issue Date
- 10-4월-2015
- Publisher
- MATERIALS RESEARCH SOCIETY
- Citation
- 2015 MRS SPRING MEETING & EXHIBIT
- Conference Name
- 2015 MRS SPRING MEETING & EXHIBIT
- Place
- US
- Conference Date
- 2015-04-06
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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