Xi, Yuyin; Hsieh, Yueh-Ling; Hwang, Ya-Hsi; Li, Shun; Ren, Fan; Pearton, Stephen J.; Patrick, Erin; Law, Mark E.; Yang, Gwangseok; Kim, Hong-Yeol, et al.
ArticleIssue Date2014CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.32, no.1PublisherA V S AMER INST PHYSICS