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High Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering ProcessHigh Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering Process
- Alternative Title
- High Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering Process
- Authors
- Hong MunPyo
- Issue Date
- 25-7월-2014
- Publisher
- KOEAUK
- Citation
- EKC2014(EU-Korea Conference on Science & Technology 2014)
- Conference Name
- EKC2014(EU-Korea Conference on Science & Technology 2014)
- Place
- AU
- Conference Date
- 2014-07-22
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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