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Effect of The Bombardment of Accelerated Negative Oxygen lons on a-IGZO Thin Films by Superimposed rf/dc Magnetron SputteringEffect of The Bombardment of Accelerated Negative Oxygen lons on a-IGZO Thin Films by Superimposed rf/dc Magnetron Sputtering
- Alternative Title
- Effect of The Bombardment of Accelerated Negative Oxygen lons on a-IGZO Thin Films by Superimposed rf/dc Magnetron Sputtering
- Authors
- Hong MunPyo
- Issue Date
- 9-7월-2014
- Publisher
- KVS(The Korean Vaccuum Society)
- Citation
- ICMAP 2014 - International Confernce on Microelectronics and Plasma Technology 2014
- Conference Name
- ICMAP 2014 - International Confernce on Microelectronics and Plasma Technology 2014
- Place
- KO
- Conference Date
- 2014-07-08
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- Appears in
Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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