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널포인트 주사탐치열현미경을 이용한 SOI 기판 위의 전기적으로 가열된 나노 히터 주변 온도분포 정량적 계측quantitative temperature profiling across the electrically heated nano-heater on silicon-on-insulator using null point scanning thermal microscopy
- Alternative Title
- quantitative temperature profiling across the electrically heated nano-heater on silicon-on-insulator using null point scanning thermal microscopy
- Authors
- KWON, Oh Myoung
- Issue Date
- 20-12월-2013
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 2013 마이크로/나노공학부문 추계학술대회
- Conference Name
- 대한기계학회 2013 마이크로/나노공학부문 추계학술대회
- Place
- KO
강원도
- Conference Date
- 2013-12-19
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- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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