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Charge Transport and Dopant Location Study of High Doping and Highly Crystallized Mixed Phase Nano-Crystal Silicon Thin Film by Neutral Beam Assisted CVD Process Near Room Temperature Deposition
- Authors
- Hong MunPyo
- Issue Date
- 2-12월-2013
- Publisher
- MATERIALS RESEARCH SOCIETY
- Citation
- 2013 MRS FALL MEETING PROGRAM & EXHIBIT
- Conference Name
- 2013 MRS FALL MEETING PROGRAM & EXHIBIT
- Place
- US
- Conference Date
- 2013-12-01
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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